Quantitative characterisation of nanoimprinted structures using metrological large range AFM and CDAFM

Author： Dai Gaoliang   Danzebrink Hans-Ulrich   Fluegge Jens   Bosse Harald  

Publisher： Inderscience Publishers

ISSN： 1746-9392

Source： International Journal of Nanomanufacturing, Vol.8, Iss.5-6, 2012-12, pp. : 372-391

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