Scanning Force Microscope Measurement of the Parameters of the Profiles of Submillimeter VLSI Components

Author： Gornev E.S.   Novikov Y.A.   Plotnikov Y.I.   Rakov A.V.  

Publisher： Springer Publishing Company

ISSN： 0543-1972

Source： Measurement Techniques, Vol.44, Iss.1, 2001-01, pp. : 44-48

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