Optimisation of a cupplater reactor for gold deposition on wafers

Author： de Kubber D. Bortels L. Deconinck J. Daenen T.E.G.

Publisher： Elsevier

ISSN： 0013-4686

Source： Electrochimica Acta, Vol.47, Iss.1, 2001-09, pp. : 91-94

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