Three-dimensional micromachining for microsystems by confined etchant layer technique

Author: Sun J.J.   Huang H.G.   Tian Z.Q.   Xie L.   Luo J.   Ye X.Y.   Zhou Z.Y.   Xia S.H.   Tian Z.W.  

Publisher: Elsevier

ISSN: 0013-4686

Source: Electrochimica Acta, Vol.47, Iss.1, 2001-09, pp. : 95-101

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Abstract