Anodic dissolution of tantalum and niobium in acetone solvent with halogen additives for electrochemical synthesis of Ta 2 O 5 and Nb 2 O 5 thin films

Author: Kamada K.   Mukai M.   Matsumoto Y.  

Publisher: Elsevier

ISSN: 0013-4686

Source: Electrochimica Acta, Vol.49, Iss.2, 2004-01, pp. : 321-327

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Abstract