Film thickness effects on the fracture of tantalum nitride on aluminum nitride thin film systems

Author: Moody N.R.   Medlin D.   Boehme D.   Norwood D.P.  

Publisher: Elsevier

ISSN: 0013-7944

Source: Engineering Fracture Mechanics, Vol.61, Iss.1, 1998-08, pp. : 107-118

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