Photoluminescence from SiN x O y films deposited by reactive sputtering

Author： Sombrio G.   Franzen P.L.   Maltez R.L.   Matos L.G.   Pereira M.B.   Boudinov H.  

Publisher： IOP Publishing

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.46, Iss.23, 2013-06, pp. : 235106-235110

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