ESPI solution for non-contacting MEMS-on-wafer testing

Author： Aswendt P.   Schmidt C.-D.   Zielke D.   Schubert S.  

Publisher： Elsevier

ISSN： 0143-8166

Source： Optics and Lasers in Engineering, Vol.40, Iss.5, 2003-11, pp. : 501-515

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