Defects properties in plastically deformed silicon studied by positron lifetime measurements

Author: Wang Z.   Leipner H.S.   Krause-Rehberg R.   Bodarenko V.   Gu H.  

Publisher: Elsevier

ISSN: 0167-9317

Source: Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 358-366

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