Synthesis of silicon oxynitride layers by dual ion-implantation and their annealing behaviour

Author: Chauhan A.R.   Bhatt G.   Yadav A.D.   Dubey S.K.   Gundu Rao T.K.  

Publisher: Elsevier

ISSN: 0168-583X

Source: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol.212, Iss.unknown, 2003-12, pp. : 451-457

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Abstract