High-energy ion implantation of iron in silicon

Author: Bhole K.G.   Kamalapurkar B.A.   Dubey S.K.   Yadav A.D.   Gundu Rao T.K.   Mohanti T.   Kanjilal D.  

Publisher: Elsevier

ISSN: 0168-583X

Source: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol.212, Iss.unknown, 2003-12, pp. : 525-529

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