Plasma-enhanced deposition of hard silicon nitride-like coatings from hexamethyldisiloxane and ammonia

Author： Xiao Z.G.   Mantei T.D.  

Publisher： Elsevier

ISSN： 0257-8972

Source： Surface and Coatings Technology, Vol.172, Iss.2, 2003-07, pp. : 184-188

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