SPM investigation of diamond-like carbon and carbon nitride films

Author: Liu D.   Benstetter G.   Lodermeier E.   Akula I.   Dudarchyk I.   Liu Y.   Ma T.  

Publisher: Elsevier

ISSN: 0257-8972

Source: Surface and Coatings Technology, Vol.172, Iss.2, 2003-07, pp. : 194-203

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Abstract