Effect of deposition and anneal temperature on the resistivity of magnetron sputtered carbon films

Author: Onoprienko A.A.   Artamonov V.V.   Yanchuk I.B.  

Publisher: Elsevier

ISSN: 0257-8972

Source: Surface and Coatings Technology, Vol.172, Iss.2, 2003-07, pp. : 189-193

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Abstract