Growth and characterization of UHV sputtering HfO 2 film by plasma oxidation and low temperature annealing

Author: Li Q.   Wang S.   Wang W.   Chi D.   Huan A.   Ong C.  

Publisher: Springer Publishing Company

ISSN: 1385-3449

Source: Journal of Electroceramics, Vol.16, Iss.4, 2006-07, pp. : 517-521

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Abstract