The design and characteristics of ring type linear ultrasonic motor for X-Y stage

Author: Lim Kee-Joe   Lee Jong-Sub   Kang Seong-Hwa  

Publisher: Springer Publishing Company

ISSN: 1385-3449

Source: Journal of Electroceramics, Vol.17, Iss.2-4, 2006-12, pp. : 557-560

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Abstract