Piezoelectric PZT films for MEMS and their characterization by interferometry

Author： Huang Z.   Zhang Q.   Corkovic S.   Dorey R.   Duval F.   Leighton G.   Wright R.   Kirby P.   Whatmore R.  

Publisher： Springer Publishing Company

ISSN： 1385-3449

Source： Journal of Electroceramics, Vol.17, Iss.2-4, 2006-12, pp. : 549-556

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