Resonance properties and mass sensitivity of monolithic microcantilever sensors actuated by piezoelectric PZT thick film

Author： Park Jae   Kwon Tae   Kim Hyung   Kim Seung   Yoon Dae  

Publisher： Springer Publishing Company

ISSN： 1385-3449

Source： Journal of Electroceramics, Vol.17, Iss.2-4, 2006-12, pp. : 565-572

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