Effects of the material properties on piezoelectric PZT thick film micro cantilevers as sensors and self actuators

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Journal of Electroceramics, Vol. 25, Iss. 1, 2010-08 ,pp. : 1-10

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PZT Thin Film Bi-Layer Devices for Phase Controlled Actuation in MEMS

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Triaxial MEMS accelerometer with screen printed PZT thick film

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Resonance properties and mass sensitivity of monolithic microcantilever sensors actuated by piezoelectric PZT thick film

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Journal of Electroceramics, Vol. 17, Iss. 2-4, 2006-12 ,pp. : 565-572

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High performance thin film PZT ultrasonic transducer by CSD for distance measurements in water

By Heinonen E.  

Journal of Electroceramics, Vol. 27, Iss. 1, 2011-08 ,pp. : 24-28

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