Control of Al and B doping transients in 6H and 4H SiC grown by vapor phase epitaxy

Author: Nordell N.   Schöner A.   Linnarsson M.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.26, Iss.3, 1997-03, pp. : 187-192

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