In x Ga 1−x As ohmic contacts to n-type GaAs with a tungsten nitride barrier

Author： Uchibori Chihiro   Ohtani Y.   Oku T.   Ono Naoki   Murakami Masanori  

Publisher： Springer Publishing Company

ISSN： 1543-186X

Source： Journal of Electronic Materials, Vol.26, Iss.4, 1997-04, pp. : 410-414

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