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Author: Maruyama Takahiro Miyajima Yutaka Hata Kazutaka Cho Sung Akimoto Katsuhiro Okumura Hajime Yoshida Sadafumi Kato Hiroo
Publisher: Springer Publishing Company
ISSN: 1543-186X
Source: Journal of Electronic Materials, Vol.27, Iss.4, 1998-04, pp. : 200-205
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Abstract
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