MOVPE production reactors for high temperature electronics

Author: Protzmann H.   Wachtendorf B.   Schoen O.   Schmitz D.   Strauch G.   Juergensen H.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.27, Iss.4, 1998-04, pp. : 342-345

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