Al + and B + implantations into 6H-SiC epilayers and application to pn junction diodes

Author: Kimoto T.   Takemura O.   Matsunami H.   Nakata T.   Inoue M.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.27, Iss.4, 1998-04, pp. : 358-364

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Abstract