Author: Rouvimov S. Liliental-Weber Z. Swider W. Washburn J. Weber E. Sasaki A. Wakahara A. Furkawa Y. Abe T. Noda S.
Publisher: Springer Publishing Company
ISSN: 1543-186X
Source: Journal of Electronic Materials, Vol.27, Iss.5, 1998-05, pp. : 427-432
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