Analysis of V/III incorporation in nonstoichiometric GaAs and InP films using SIMS

Author: Docter D.   Ibbetson J.   Gao Y.   Mishra U.   Liu T.   Grider D.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.27, Iss.5, 1998-05, pp. : 479-483

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Abstract