Author: Kitada Takahiro Saeki Tatsuya Ohashi Masanobu Shimomura Satoshi Adachi Akira Okamoto Yasunori Sano Naokatsu Hiyamizu Satoshi
Publisher: Springer Publishing Company
ISSN: 1543-186X
Source: Journal of Electronic Materials, Vol.27, Iss.9, 1998-09, pp. : 1043-1046
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