Surface etching of 6H-SiC (0001) and surface morphology of the subsequently grown GaN via MOCVD

Author: Xie Z.   Wei C.   Chen S.   Jiang S.   Edgar J.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.29, Iss.4, 2000-04, pp. : 411-417

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