Author: Lee C.D. Ramachandran V. Sagar A. Feenstra R.M. Greve D.W. Sarney W.L. Salamanca-Riba L. Look D.C. Bai Song Choyke W.J. Devaty R.P.
Publisher: Springer Publishing Company
ISSN: 1543-186X
Source: Journal of Electronic Materials, Vol.30, Iss.3, 2001-03, pp. : 162-169
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