Spatial light modulators based on micromachined reflective membranes on viscoelastic layers

Author: Sakarya S.   Vdovin G.   Sarro P.M.  

Publisher: Elsevier

ISSN: 0924-4247

Source: Sensors and Actuators A: Physical, Vol.108, Iss.1, 2003-11, pp. : 271-275

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