Analysis, testing and optimisation of electrostatic comb-drive levitational actuators

Author： Molfese A.   Nannini A.   Pennelli G.   Pieri F.  

Publisher： Springer Publishing Company

ISSN： 0925-1030

Source： Analog Integrated Circuits and Signal Processing, Vol.48, Iss.1, 2006-08, pp. : 33-40

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