Field effect transducers for work function gas measurements: device improvements and comparison of performance

Author: Burgmair M.   Frerichs H.-P.   Zimmer M.   Lehmann M.   Eisele I.  

Publisher: Elsevier

ISSN: 0925-4005

Source: Sensors and Actuators B: Chemical, Vol.95, Iss.1, 2003-10, pp. : 183-188

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract