Optimization of transition radiation emitting targets for storage ring synchrotrons used as X-ray lithography sources

Author： Minkov D.   Yamada H.   Toyosugi N.   Yamaguchi T.   Kadono T.   Morita M.  

Publisher： Springer Publishing Company

ISSN： 0946-2171

Source： Applied Physics B, Vol.86, Iss.1, 2007-01, pp. : 19-23

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