Direct removal of SU-8 using focused laser writing

Author: Cheong F.C.   Varghese B.   Sindhu S.   Liu C.M.   Valiyaveettil S.   Bettiol A.A.   van Kan J.A.   Watt F.   Chin W.S.   Lim C.T.   Sow C.H.  

Publisher: Springer Publishing Company

ISSN: 0947-8396

Source: Applied Physics A, Vol.87, Iss.1, 2007-04, pp. : 71-76

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract