Large-area growth of vertically aligned ZnO pillars by radio-frequency magnetron sputtering

Author： Huang J.H.   Wang C.Y.   Liu C.P.   Chu W.H.   Chang Y.J.  

Publisher： Springer Publishing Company

ISSN： 0947-8396

Source： Applied Physics A, Vol.87, Iss.4, 2007-06, pp. : 749-753

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Optical Analysis of Nanocrystalline ZnO Films Coated on Porous Silicon by Radio Frequency (RF) Magnetron Sputtering

By Chuah L.S.  

Composite Interfaces, Vol. 18, Iss. 5, 2011-09 ,pp. : 441-448

Taylor & Francis Ltd

Access to resources Recommend Favorite

Improvement of thickness distribution and crystallinity of ZnO thin films prepared by radio frequency planer magnetron sputtering

By Takeuchi M.   Inoue K.   Yoshino Y.   Ohwada K.  

Vacuum, Vol. 51, Iss. 4, 1998-12 ,pp. : 565-569

Elsevier

Access to resources Recommend Favorite

Preparation of Zn 1-x Mg x O films by radio frequency magnetron sputtering

By Minemoto T.   Negami T.   Nishiwaki S.   Takakura H.   Hamakawa Y.  

Thin Solid Films, Vol. 372, Iss. 1, 2000-09 ,pp. : 173-176

Elsevier

Access to resources Recommend Favorite

Reduction of residual stress for ZnO/Al thin films on glass substrate prepared by radio frequency magnetron sputtering

By Sakaguchi K.   Iwasa S.   Yoshino Y.  

Vacuum, Vol. 51, Iss. 4, 1998-12 ,pp. : 677-681

Elsevier

Access to resources Recommend Favorite

Transparent and conductive ZnO:Al films deposited by large area reactive magnetron sputtering

By Szyszka B.   Sittinger V.   Jiang X.   Hong R.J.   Werner W.   Pflug A.   Ruske M.   Lopp A.  

Thin Solid Films, Vol. 442, Iss. 1, 2003-10 ,pp. : 179-183

Elsevier

Access to resources Recommend Favorite