Deposition of ZnO thin films by magnetron sputtering for a film bulk acoustic resonator

Author： Lee J.B.   Kim H.J.   Kim S.G.   Hwang C.S.   Hong S.-H.   Shin Y.H.   Lee N.H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.435, Iss.1, 2003-07, pp. : 179-185

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Nanostructure of ZnO thin films prepared by reactive rf magnetron sputtering

By Takai O.   Futsuhara M.   Shimizu G.   Lungu C.P.   Nozue J.  

Thin Solid Films, Vol. 318, Iss. 1, 1998-04 ,pp. : 117-119

Elsevier

Access to resources Recommend Favorite

RF magnetron sputtering deposition of amorphous Zn–Sn–O thin films as a buffer layer for CIS solar cells

By  

PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Vol. 12, Iss. 6, 2015-06 ,pp. : 688-691

John Wiley & Sons Inc

Access to resources Recommend Favorite

Effective electromechanical coupling coefficient (kt 2 ) for fundamental mode of thickness extensional mode thin film bulk acoustic wave resonator fabricated by ZnO thin film

By Takeuchi M.   Yamada H.   Yoshino Y.   Makino T.   Arai S.  

Vacuum, Vol. 66, Iss. 3, 2002-08 ,pp. : 463-466

Elsevier

Access to resources Recommend Favorite

Characteristics of ZnO thin films deposited onto Al/Si substrates by r.f. magnetron sputtering

By Ki H.Y.   Choi J.-W.   Lee D.-H.  

Thin Solid Films, Vol. 302, Iss. 1, 1997-06 ,pp. : 116-121

Elsevier

Access to resources Recommend Favorite

Highly transparent and conductive rare earth-doped ZnO thin films prepared by magnetron sputtering

By Minami T.   Yamamoto T.   Miyata T.  

Thin Solid Films, Vol. 366, Iss. 1, 2000-05 ,pp. : 63-68

Elsevier

Access to resources Recommend Favorite