Development of a sinusoidal phase-shifting self-mixing interferometer for real-time displacement measurement with nanometer accuracy

Author： Xia Wei   Yang Zhenyu   Liu Qiang   Hao Hui   Guo Dongmei   Wang Ming  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.24, Iss.5, 2013-05, pp. : 55011-55019

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