Author: Schneider Jens Holzer Frank Kraus Markus Kopinke Frank-Dieter Roland Ulf
Publisher: IOP Publishing
ISSN: 0963-0252
Source: Plasma Sources Science and Technology, Vol.22, Iss.1, 2013-02, pp. : 15010-15017
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
By Schneider Jens Holzer Frank Rabe Carsten Häupl Tilmann Kopinke Frank-Dieter Roland Ulf
Plasma Sources Science and Technology, Vol. 22, Iss. 2, 2013-04 ,pp. :