Normal regime of the weak-current mode of an rf capacitive discharge

Author: Lisovskiy V.   Yegorenkov V.   Artushenko E.   Booth J-P   Martins S.   Landry K.   Douai D.   Cassagne V.  

Publisher: IOP Publishing

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.22, Iss.1, 2013-02, pp. : 15018-15029

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract