Comparison of measured and simulated electron energy distribution functions in low-pressure helium plasmas

Author: Gruenwald J.   Tskhakaya D.   Kovačič J.   Čerček M.   Gyergyek T.   Ionita C.   Schrittwieser R.  

Publisher: IOP Publishing

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.22, Iss.1, 2013-02, pp. : 15023-15029

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Abstract