Modulation of electron energy distributions and discharge parameters in a dual frequency ICP discharge

Author: Mishra Anurag   Tae Hyung Kim   Kyong Nam Kim   Geun Young Yeom  

Publisher: IOP Publishing

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.22, Iss.1, 2013-02, pp. : 15022-15026

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Abstract