X-ray interferometric investigation of deformation fields in ion-implanted silicon crystals

Author： Drmeyan H. Aboyan A. Eyramjyan F.

ISSN： 1027-4510

Source： Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Vol.5, Iss.1, 2011-02, pp. : 155-158

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