Features of the manufacture of deep X-ray lithography masks in the siberian synchrotron and terahertz radiation center

Author: Gol'denberg B.   Abramskii A.   Zelinskii A.   Maslii A.   Maksimovskii E.   Kondrat'ev V.   Korol'kov V.   Kuper K.   Petrova E.   Pindyurin V.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1027-4510

Source: Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Vol.5, Iss.1, 2011-02, pp. : 159-165

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Abstract