Annealing-induced evolution of optical properties of the multilayered nanoperiodic SiO x /ZrO 2 system containing Si nanoclusters

Author: Ershov A.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7826

Source: Semiconductors, Vol.45, Iss.6, 2011-06, pp. : 731-737

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Abstract