From overall equipment efficiency (OEE) to overall Fab effectiveness (OFE)

Author: Oechsner R.   Pfeffer M.   Pfitzner L.   Binder H.   Muller E.   Vonderstrass T.  

Publisher: Elsevier

ISSN: 1369-8001

Source: Materials Science in Semiconductor Processing, Vol.5, Iss.4, 2002-08, pp. : 333-339

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Abstract