Study of PMMA recoveries on micrometric patterns replicated by nano-imprint lithography

Author: Martin C.   Ressier L.   Peyrade J.P.  

Publisher: Elsevier

ISSN: 1386-9477

Source: Physica E, Vol.17, Iss.unknown, 2003-04, pp. : 523-525

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract