Mathematical modeling and experimental study on photoresist whirl-coating in convex-surface laser lithography

Author: Chen Long-jiang   Liang Yi-yong   Luo Jian-bo   Zhang Chun-hui   Yang Guo-guang  

Publisher: IOP Publishing

ISSN: 1464-4258

Source: Journal of Optics A: Pure and Applied Optics, Vol.11, Iss.10, 2009-10, pp. : 105408-105415

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