Period of time： 2004年1期
Publisher： Elsevier
Founded in： 1983
Total resources： 4
ISSN： 0167-9317
Subject： TN Radio Electronics, Telecommunications Technology
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Microelectronic Engineering,volume 69,issue 1
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Electrochemical characterization of copper chemical mechanical polishing
By Du T., Tamboli D., Desai V. in (2003)
Microelectronic Engineering,volume 69,issue 1 , Vol. 69, Iss. 1, 2003-08 , pp.
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