Fabrication of a miniaturized electron lens system and laser micro-machining condition for silicon membrane

Author： Ahn S.   Kim D.-W.   Kim H.S.   Ahn S.J.   Cho J.  

Publisher： Elsevier

ISSN： 0167-9317

Source： Microelectronic Engineering, Vol.69, Iss.1, 2003-08, pp. : 57-64

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