Journal of Micromechanics and Microengineering,volume 25,issue 2  (02-2015)

Period of time： 2015年2期

Publisher： IOP Publishing

Founded in： 1991

Total resources： 42

E-ISSN： 1361-6439|25|2

ISSN： 0960-1317

Subject： T Industrial Technology

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Journal of Micromechanics and Microengineering,volume 25,issue 2

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State of the art in acoustic energy harvesting

Journal of Micromechanics and Microengineering,volume 25,issue 2 , Vol. 25, Iss. 2, 2015-02 , pp. 23001-23013

IOP Publishing

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Nanoporous anodic aluminum oxide as a promising material for the electrostatically-controlled thin film interference filter

Journal of Micromechanics and Microengineering,volume 25,issue 2 , Vol. 25, Iss. 2, 2015-02 , pp. 25001-25014

IOP Publishing

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Monolithic integrated system with an electrowetting-on-dielectric actuator and a film-bulk-acoustic-resonator sensor

Journal of Micromechanics and Microengineering,volume 25,issue 2 , Vol. 25, Iss. 2, 2015-02 , pp. 25002-25010

IOP Publishing

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Post-CMOS compatible high-throughput fabrication of AlN-based piezoelectric microcantilevers

Journal of Micromechanics and Microengineering,volume 25,issue 2 , Vol. 25, Iss. 2, 2015-02 , pp. 25003-25013

IOP Publishing

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Highly responsive core-shell microactuator arrays for use in viscous and viscoelastic fluids

Journal of Micromechanics and Microengineering,volume 25,issue 2 , Vol. 25, Iss. 2, 2015-02 , pp. 25004-25014

IOP Publishing

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Solvent-transfer assisted photolithography of high-density and high-aspect-ratio superhydrophobic micropillar arrays

Journal of Micromechanics and Microengineering,volume 25,issue 2 , Vol. 25, Iss. 2, 2015-02 , pp. 25005-25012

IOP Publishing

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An integrated photocatalytic microfluidic platform enabling total phosphorus digestion

Journal of Micromechanics and Microengineering,volume 25,issue 2 , Vol. 25, Iss. 2, 2015-02 , pp. 25006-25013

IOP Publishing

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High precision cell slicing by harmonically actuated ultra-sharp SixNy blades

Journal of Micromechanics and Microengineering,volume 25,issue 2 , Vol. 25, Iss. 2, 2015-02 , pp. 25007-25015

IOP Publishing

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Wafer level fabrication of single cell dispenser chips with integrated electrodes for particle detection

Journal of Micromechanics and Microengineering,volume 25,issue 2 , Vol. 25, Iss. 2, 2015-02 , pp. 25008-25017

IOP Publishing

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A novel MEMS actuator with large lateral stroke driven by Lorentz force

Journal of Micromechanics and Microengineering,volume 25,issue 2 , Vol. 25, Iss. 2, 2015-02 , pp. 25009-25015

IOP Publishing

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